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Anaerobic Oven
(Less than 100ppm)

Overview

In recent years, wiring material has been changing from aluminum to copper with low resistivity.
Accordingly, when heat processed in a normal chamber, copper parts oxidize, leading to flaws.
In addition, aging at 250°C is performed to inspect whether the written data on flash memory is deleted with electromigration, and bump parts oxide, so the oxygen concentration must be lowered to less than 100 ppm.
This Anaerobic Oven was developed to meet these demands. Aging tests at 350°C can be performed with an oxygen concentration of 100 ppm or less.

Significant reduction in nitrogen gas use
This model features a high air tight design of the chamber and nitrogen gas flow rate switching mechanism to significantly reduce the amount of nitrogen gas used.
Reduced temperature pull-down time for reduced processing time
This model uses an innovative chamber cooling mechanism to reduce the temperature pull-down time by one-third when compared to conventional models. (Reference value: lowered from 240 minutes to 80 minutes) As a result, specimens can be more quickly removed, and processing time can be reduced.
Profile (example)
Chamber structure
Main specifications

Please scroll horizontally to look at table below.

Model IPHH-202L
Power supply 200V AC φW 50/60Hz
*Supporting any power supply voltage as an option
Maximum power consumption 4.4kVA
Method Forced hot air circulation
Performance Temperature range (Rt.＋50)℃ to 300℃
Temperature fluctuation range ±0.2°C at 150°C or lower
±0.3°C at 300°C or lower
Temperature uniformity ±1.5°C at 150°C or lower
±2.5°C at 300°C or lower
Temperature heat-up time Within 70 minutes from +50°C to +300°C
N2 gas Gas N2 gas (ambient temp. dry gas)
Min. oxygen concentration 100 ppm or less (N2 gas injection at 40~200 L/min)
Gas injection Mouthpiece ring joint 3/8-inch pipe fitting
Inside capacity 216 L
Dimensions Inside dimensions W600×H600×D600mm (excluding protrusions)
Outside dimensions W1190×H1711×D1040mm (excluding protrusions)
Weight 250 kg
Instrumentation Operation mode Constant operation, program operation
Setting and indication ranges Temperature: 0 to +310°C
Time: 0 to 9999 hours 59 minutes
Setting and indication resolution Temperature: 1°C
Time: 1 minute
  • * Performance is without a specimen at an ambient temperature of +23°C.
  • * The model is for operational purposes and may be changed after order. Thank you for your understanding.

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