Electromigration evaluation at 350°C

As the miniaturization of semiconductor devices progresses, evaluating electromigration under excessively severe conditions is becoming essential.

The AEM Series Electro-Migration Evaluation System offers accurate measurements based on temperature and current stress.two major factors affecting a device’s service life. and analysis software for determining the necessary parameters for judging the life of a device.

Designed to meet a wide range of evaluation needs, from cutting-edge evaluations to production management, the AEM Series offers enhanced operability, superior reliability, and simplified data analysis.

Main specifications

Stress current source	Output range	＋ DC, 0.1 mA to 200 mA
	Accuracy	0.1 to 200 mA: ± (0.3% of set point ＋ 50 μA)
	Following voltage	35V
Extrusion test voltage	Output range	－10.0 to －1.0 V / 1.0 to 20.0 V
	Accuracy	± (2% of set point ＋ 20 mV)
Oven	Temperature control range	＋65 to ＋350℃
	Temperature fluctuation	±0.5℃ (＋65 to ＋350℃)
	Temperature uniformity	±1.0℃ (＋100℃), ±2.0℃ (＋200℃), ±3.5℃ (＋300℃)

System variation

Model		AEM−240C3 AAA	AEM−160C2 0AA	AEM−080C1 00A
EM module output current	Oven 1	200mA	200mA	200mA
	Oven 2	200mA	200mA	-
	Oven 3	200mA	/
Number of evaluation channels		240ch	160ch	80ch
DUT board	Number of installed units	24 (8×3 ovens)	16 (8×2 ovens)	8
	IC socket	5 each per board (DIP 28-pin, 600 mil and 300 mil)

• *1 Including stand
• *2 Dimensions in parentheses include protrusions