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Electromigration Evaluation System AEM Series

Overview of Equipment"

Electromigration evaluation at 350°C

As the miniaturization of semiconductor devices progresses, evaluating electromigration under excessively severe conditions is becoming essential.
The AEM Series Electro-Migration Evaluation System offers accurate measurements based on temperature and current stress.two major factors affecting a device’s service life. and analysis software for determining the necessary parameters for judging the life of a device.
Designed to meet a wide range of evaluation needs, from cutting-edge evaluations to production management, the AEM Series offers enhanced operability, superior reliability, and simplified data analysis.

Main specifications

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Stress current source Output range + DC, 0.1 mA to 200 mA
Accuracy 0.1 to 200 mA: ± (0.3% of set point + 50 μA)
Following voltage 35V
Extrusion test voltage Output range -10.0 to -1.0 V / 1.0 to 20.0 V
Accuracy ± (2% of set point + 20 mV)
Oven Temperature control range +65 to +350℃
Temperature fluctuation ±0.5℃ (+65 to +350℃)
Temperature uniformity ±1.0℃ (+100℃), ±2.0℃ (+200℃), ±3.5℃ (+300℃)
System variation

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Model AEM−240C3
EM module output current Oven 1 200mA 200mA 200mA
Oven 2 200mA 200mA -
Oven 3 200mA /
Number of evaluation channels 240ch 160ch 80ch
DUT board Number of installed units 24 (8×3 ovens) 16 (8×2 ovens) 8
IC socket 5 each per board (DIP 28-pin, 600 mil and 300 mil)
  • *1 Including stand
  • *2 Dimensions in parentheses include protrusions

Monitor Screen

The monitor screen offers real-time information on the test progress, resistance, and rate of change of all DUTs at a glance.
Monitor screen

Analytical Software

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