Electromigration Evaluation System AEM Series

Overview of Equipment"

Electromigration evaluation at 350°C

As the miniaturization of semiconductor devices progresses, evaluating electromigration under excessively severe conditions is becoming essential.
The AEM Series Electro-Migration Evaluation System offers accurate measurements based on temperature and current stress.two major factors affecting a device’s service life. and analysis software for determining the necessary parameters for judging the life of a device.
Designed to meet a wide range of evaluation needs, from cutting-edge evaluations to production management, the AEM Series offers enhanced operability, superior reliability, and simplified data analysis.

Main specifications

Please scroll horizontally to look at table below.

Stress current source	Output range	＋ DC, 0.1 mA to 200 mA
	Accuracy	0.1 to 200 mA: ± (0.3% of set point ＋ 50 μA)
	Following voltage	35V
Extrusion test voltage	Output range	－10.0 to －1.0 V / 1.0 to 20.0 V
Extrusion test voltage	Accuracy	± (2% of set point ＋ 20 mV)
Oven	Temperature control range	＋65 to ＋350℃
	Temperature fluctuation	±0.5℃ (＋65 to ＋350℃)
	Temperature uniformity	±1.0℃ (＋100℃), ±2.0℃ (＋200℃), ±3.5℃ (＋300℃)

System variation

Please scroll horizontally to look at table below.

Model		AEM−240C3 AAA	AEM−160C2 0AA	AEM−080C1 00A
EM module output current	Oven 1	200mA	200mA	200mA
	Oven 2	200mA	200mA	-
	Oven 3	200mA	/
Number of evaluation channels		240ch	160ch	80ch
DUT board	Number of installed units	24 (8×3 ovens)	16 (8×2 ovens)	8
DUT board	IC socket	5 each per board (DIP 28-pin, 600 mil and 300 mil)

*1 Including stand
*2 Dimensions in parentheses include protrusions

Monitor Screen

The monitor screen offers real-time information on the test progress, resistance, and rate of change of all DUTs at a glance.

: Monitor screen