Electromigration evaluation at 350°C
As the miniaturization of semiconductor devices progresses, evaluating electromigration under excessively severe conditions is becoming essential.
The AEM Series Electro-Migration Evaluation System offers accurate measurements based on temperature and current stress.two major factors affecting a device’s service life. and analysis software for determining the necessary parameters for judging the life of a device.
Designed to meet a wide range of evaluation needs, from cutting-edge evaluations to production management, the AEM Series offers enhanced operability, superior reliability, and simplified data analysis.
- Main specifications
Stress current source Output range ＋ DC, 0.1 mA to 200 mA Accuracy 0.1 to 200 mA: ± (0.3% of set point ＋ 50 μA) Following voltage 35V Extrusion test voltage Output range －10.0 to －1.0 V / 1.0 to 20.0 V Accuracy ± (2% of set point ＋ 20 mV) Oven Temperature control range ＋65 to ＋350℃ Temperature fluctuation ±0.5℃ (＋65 to ＋350℃) Temperature uniformity ±1.0℃ (＋100℃), ±2.0℃ (＋200℃), ±3.5℃ (＋300℃)
- System variation
EM module output current Oven 1 200mA 200mA 200mA Oven 2 200mA 200mA - Oven 3 200mA / Number of evaluation channels 240ch 160ch 80ch DUT board Number of installed units 24 (8×3 ovens) 16 (8×2 ovens) 8 IC socket 5 each per board (DIP 28-pin, 600 mil and 300 mil)
- *1 Including stand
- *2 Dimensions in parentheses include protrusions
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