Text Size


Semiconductor Parametric Test System

  • Overview of Equipment
  • Features

Support from the package level to the wafer level

As wafers become larger in diameter, smaller in size, and more highly integrated, reliability testing of single unit transistors is becoming increasingly important.

This system can measure the electrical characteristics and continuous changes of high accuracy voltage and current application and FET single unit transistors, collect the data on a computer, monitor the data, and perform other central management tasks.

Main specifications
Measurement program FET single unit transistor measurement library, 48 types
Temperature control Temperature chamber (ESPEC bench-top type temperature (& humidity) chamber SU-661) Full, semi-auto, manual prober (Contact us about the manufacturer)
Temperature control range -60 to +150°C
SMU performance Voltage ±50 V / current ±100 mA
DUT connection

DUT board (6 sockets)

  • DIP600mil, 28pins
  • DIP300mil, 16pins



Probe guard (for high temperature, micro current)

* Available depending on the layout.