Online Diagnostics Service
Before sending your backtrace data
* The data should include the following three:
|1. Backtrace data||BTyyyymmdd_hr mm sec_t.btd|
|2. Control setting, maker maintenance information||BTyyyymmdd_hr mm sec_c.bts|
|3. Operation setting information (constant value, program setting)||BTyyyymmdd_hr mm sec_p.bts|
Confirm the alarm date & time
The date and time of alarm occurrence are recorded in the name of the data file.
Please confirm that it matches the date and time of the trouble. If the date and time do not match, it is assumed that [Resume Recording] button was not selected after the previous Alarm event.
In this case, select [Chamber Setup] screen → [Configuration] screen → [Set Option] screen → [Set Trace Back], and select [Resume Recording].
Send the "Operation setting information (constant value, program setting)" Data
The Operation Setting Information stores all the programs set to the equipment.
In case the "Operation setting information" is classified information of your company and cannot be provided to ESPEC, please provide the remaining two data items.
The Diagnosis Report based on the received information shall be shared among all the concerned parties including our distributors for immediate recovery.
Please select "Agree" if you agree to these terms or "Disagree" if you do not agree to these terms.
If you do not agree to these terms, we cannot provide this service.