Electromigration evaluation at 400°C

The operating life of semiconductor devices relies on microfabrication and new materials, and therefore, electromigration evaluation under more rigorous life acceleration conditions is important.

This system is equipped with analytical software to obtain the parameters necessary for determining the device life from accurate measurements of the life acceleration factors of temperature and current stress.

The AEM-2000 Electromigration Evaluation System features improved operability, reliability, and ease of data analysis for various applications from tip evaluation to production control, and it accurately meets customers' needs for evaluation.

Main specifications

Stress current source	Setting ranges	+DC0.1mA to 200mA
	Following voltage	35V
Extrusion test voltage	Setting ranges	-10.0 V to -1.0 V and 1.0 V to 20.0 V
	Accuracy	±(2% of setting value＋20 mV)
Oven	Temperature control range	+65 to +400°C
	Temperature fluctuation width	±0.5°C (+65 to 350°C)
	Temperature uniformity	±2.5°C (+65 to +350°C)
	Accessories	Nitrogen gas connecting port

System variation

Model		AEM-240C3 AAA	AEM-160C2 0AA	AEM-080C1 00A
EM module output current	Oven 1	200mA	200mA	200mA
	Oven 2	200mA	200mA	-
	Oven 3	200mA	/
Number of evaluation channels		240ch	160ch	80ch
DUT board	Number of boards	24 (8× 3 ovens)	16 (8× 2 ovens)	8
	IC sockets	5 sockets/board (both DIP 28-pin 600 mil and 300 mil)
Control cabinet dimensions (mm)		W580×D1220×H1945	W580×D1220×H1490
Structure