Electromigration Evaluation System AEM Series


>> P.7

6ANALYTICALSOFTWARESTARTPre-testTCRtestingENDElectromigrationtestingDUTNo.Temperature(℃)Time(h)DisplaysthemeasuredresistanceforeachDUTingraphformDisplaysthemeasuredresistanceforeachDUTandtemperatureingraphformDisplaysthemeasuredresistanceforeachDUTandtimeingraphform.Absoluteorrelativevaluescanbedisplayed.Densitydependenceplots(NormalLogNormalWiebull)TemperaturedependenceCurrentdensitydependenceOtherparametersdependenciesTemperatureDependenceCurrentDensityDependenceLineWidthDependenceResistance(%)Resistance(Ω)Resistance(Ω)MTTF(h)MTTF(h)MTTF(h)Temperature(℃)(mA)LineWidth(μm)Displaysthetemperature-dependenceingraphformbasedonthelife(MTTF/median)calculatedfromthedistributionplot.(Arrheniusplot)Displaysthecurrentdensitydepen-denceingraphformbasedonthelife(MTTF/median)calculatedfromthedistributionplot.Displaysingraphformthedependenceonwirelength,wirewidth,thicknessandnumberofcontacts.Activationenergy(Ea)CurrentdensityindeBlacsmodel


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