System configuration to fit number of measurement

MSM (DC multi-source/ measure=current/ voltage, output/ monitor) board consists of 4 MSMs with independent 5W high output. 1 unit comprises 10 MSM boards, with a total of 40 MSMs. The system can be upgraded according to measurement volume up to 5 units (2OO MSMs). Upgrade can be done by adding units.

Precision current and voltage impression and measurement

Current at 9 ranges, measurement resolution of maximum current ±1OOmA, and minimum current ±1pA. Voltage at 2 ranges, resolution of maximum voltage ±50V and minimum voltage 1 mV, enabling wide and precise impression and measurement.

Measurement at minimum 10 msec

Delivers high-speed measurement for multiple channels. Measures at top speed of lO msec per 40 channels, while acquiring data.

Various evaluation items

The TDDB Evaluation System is configured for wafer level and liquid crystal glass substrate level, by effectively systemizing DC multisource/ measure. It also applies for requirements of QDB evaluation and TZDB evaluation, while FET property evaluation can also be realized by exchanging software.