Model

100 V

300 V (optional)

500 V (optional)

Channel configuration

Standard 25ch. (max. 150ch per rack)

Standard 25ch. (max. 150ch per rack)

5ch

25ch

5ch

25ch

5ch

25ch

Software

Windows^(R)XP

Windows^(R)XP

Measurement

Stress power supply

Stress constant voltage

Not applied/ 1 to 100 V DC

Not applied/
1 to 300 V DC

Not applied/
1 to 500 V DC

Min. set voltage resolution

0.1V (1 to 100 V, individually able to set from the measurement voltage) 

0.1 V
(set at 1 to 200 V),
0.1 V
(set at 200 to 300 V)

0.1 V
(set at 1 to 200 V),
0.1 V
(set at 200 to 500 V)

Applied voltage accuracy 

±(0.7% of set value +300mA)

±(0.7% of set value +300mA) 

Resistance evaluation and measurement time 

DC measurement range

500μA to less than or equal to 10 pA 

500μA to less than or equal to 10 pA 

Resistance measurement range

2 × 10⁵ to 1 × 10¹³
(when applying 100 V),
2 × 10³ to 1 × 10^{11 (when applying 1 V)}

Measurement accuracy *1

7.0 × 10¹² to 1.3 × 10¹³

7.0 × 10¹² to 1.3 × 10¹³

Measurement voltage

1 to 100 V DC (0.1 V step)

1 to 300 V DC
(1 to 200V DC: 0.1 V step),
(200 to 300V DC: 1.0 V step)

1 to 500 V DC
(1 to 200V DC: 0.1 V step),
(200 to 500V DC: 1.0 V step) 

Measurement time (1 time) *2

15 sec.
+charging time

80 sec.
+charging time

15 sec.
+charging time

80 sec.
+charging time

15 sec.
+charging time

80 sec.
+charging time

Leak-touch detection

Normal 100μsec/ less than or equal to specified number of detections on channel basis

Normal 100μsec/ less than or equal to specified number of detections on channel basis 

Measurement cable

Type

+side

Single cable

Heat-resistant single cable

-side

Coaxial cable (one-layer shield)

Coaxial cable (one-layer shield)

Coated material

Teflon (heat resistance of +150°C)

Teflon (heat resistance of +150°C)

Length

Connects the scanner unit and connection unit: 2.5m, Beyond connection unit: 1.5m

Connects the scanner unit and connection unit: 2.5m, Beyond connection unit: 1.5m

Connection unit

25-channel connection, Coaxial connector

25-channel connection,
+side: Metallic outlet, -side: Square type coaxial connector

Measuring equipment

Model: 6514 (Keithley Instruments, Inc.)

Model: 6514 (Keithley Instruments, Inc.)

External dimension

W: 530 × H1750 × D940 mm

W: 530 × H1750 × D940 mm

Power supply facility

100V AC, 1φ, 10.0A,
120V AC, 1φ, 8.3A,
220V AC, 1φ, 4.5A,
240V AC, 1φ, 4.2A

100V AC, 1φ, 10.0A,
120V AC, 1φ, 8.3A,
220V AC, 1φ, 4.5A,
240V AC, 1φ, 4.2A