Electromigration Evaluation System (AEM-2000)

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Type of evaluation		Electromigration (constant current) testing Stress migration testing Extrusion testing TCR testing
Stress-current	Output range	+1µA to +50mA DC
	Accuracy	1µA to 1 mA: ±(0.2% of S.V.+1µA) 1.01mA to 50mA: ±(0.2% of S.V. +25µA)
	Follow voltage	35V
Extrusion test voltage	Output range	-10V to +20V
Extrusion test voltage	Accuracy	±(2% of setting +20mV)
Oven	Temperature range	+65 to +400°C
	Temperature fluctuation	±0.5°C (+65 to +350°C)
	Temperature Uniformity	±2.5°C (+65 to +350°C)
	accessory	N₂ gas inlet

System variation

Model		AEM-240C3 AAA	AEM-160C2 0AA	AEM-080C1 00A
EM module output current	Oven 1	50mA	50mA	50mA
	Oven 2	50mA	50mA	-
	Oven 3	50mA	/
Number of test channels		240ch	160ch	80ch
DUT board	Number of board	24 (8 × 3 ovens)	16 (8 × 2 ovens)	8
	IC sockets	5 sockets/board (both DIP 28-pin 600 mil and DIP 28-pin 300 mil)
Power supply		200V AC 3φ 50/60Hz (cabinet), 100V AC 1φ 50/60Hz (PC unit)
Power consumption	Cabinet	Max. 10kW	Max. 7kW	Max. 4kW
	PC unit	350W
Cabinet dimensions (mm)		W580 × D1220 × H1945	W580 × D1220 × H1490
PC rack dimensions (mm)		W680 × D640 × H1260
Oven configuration

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