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Clean oven used exclusively in in-line heat processing such as baking in processes after resist-coat baking,anneaing and color-filtering on LCD production line. Clean oven is usable for first to tenth generation equipment.
Better uniform heat processing and fewer particles produced during processing. Space-saving design that reduces installation footprint of equipment reversing the trend to grow with glass size.HSC Series contributes to effective use of limited space in clean room.

Specifications (Example) Glass sheet size G1 to G10 Temp.range +90 to+300°C Temp.uniformity range ±4.5°C (surface temp.at+230°C) Cleanliness classification(0.3μm) Class 4,ISO standards (Corresponding class 10, FED-STD-209E standards) Optional Sublimates reducing unit		Holds multiple glass shelves in a compact space by using a gondola drive in the oven. Double inner structure, horizontal duct system ensures an excellent temperature uniformity performance. A special heat-resistant filter enables low particle levels. Modular carrier robot,cooling unit,and loader/unloader. Options for various applications are available •For low oxygen concentrations .For out-gas and sublimate processes